The proposed weak coupling resonator and sensor structure. Credit: Microsystems & Nanoengineering (2025). doi:10.1038/s41378-025-00937-z
A research team led by a professor. Chen Deyong and Wang Junbo of the Aerospace Information Research Institute (AIR) of the Chinese Academy of Sciences have developed a new micro-sensor that enhances both the accuracy and measurement range of vacuum pressure detection. Their findings were published in Journal Microsystems & Nanoengineering.
Wide vacuum sensors play an important role in a variety of high-tech fields. For example, in the semiconductor industry, accurate pressure control is important for processes such as chemical vapor deposition and plasma etching. However, existing sensor technologies face trade-offs between measurement range and accuracy. Pirani gauges offer a wide range of measurements and are not accurate, while capacitive diaphragm gauges (CDGs) boast high accuracy, but limited range. The combined sensor combines the two technologies and is large, complex and sensitive to gas types.
To tackle these issues, the team created a Microelectromechanical System (MEMS) pressure sensor. A single sensing element can be used to operate smoothly over six digits (0.3 PA to 100,000 PA) and two resonant modes can be integrated into one chip. At low pressures (0.3 PA to 1,000 PA), we employ a “mode localization” mode, which amplifies small pressure changes into easily detectable signals. Higher pressures (1,000 PA – 100,000 PA) automatically switch to traditional resonance mode. This is very accurate and stable.
This dual-mode design offers exceptional performance. The sensor achieves a resolution of approximately 0.1 PA in low-pressure environments and a resolution of 2.0 PA in high-pressure settings. Calibration errors are minimal. Under low pressure, it is a relative deviation of 1.99% at 120°C, and under high pressure, it is a full-scale deviation of 0.01%. It also works reliably over a wide temperature range from –20°C to 120°C, and is not affected by different gas types.
All of these features are integrated into a compact MEMS chip with a volume of just 27.2 mm3. This is less important than traditional commercial sensor chips.
This study provides insight into semiconductor manufacturing, space missions, and precision engineering applications.
Details: A new high-speed wide range vacuum sensor based on Jiaxin Qin et al, weak coupled resonator, Microsystems & Nanoengineering (2025). doi:10.1038/s41378-025-00937-z
Provided by the Chinese Academy of Sciences
Citation: Researchers will develop a new dual-mode MEMS sensor for wide range of vacuum pressure detection, obtained from July 17, 2025 from https://news/2025-07-dual-mode-mems-sensor-wide-wide.html (July 17, 2025)
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